|July 1, 2008 |
Prof. Fisher co-PI on NSF Major Research Instrumentation (MRI) grant
Prof. Fisher was co-PI on a grant with Prof. Yong Shi (PI, ME) and co-PIs Chang-Hwan Choi and EH Yang (ME) and Stefan Strauf (PEP) to enable the Acquisition of an Inductively Coupled Plasma (ICP) Etcher for Nano/Micro Device Fabrication. The requested ICP etching system will greatly augment existing micro/nano fabrication capabilities within the MicroDevices Laboratory (MDL) at Stevens.
For more information, please contact:
Dr. Frank Fisher
Interim Department Director and co-Director of the Nanotechnology Graduate Program
The Innovation University TM